The works of FTIAN. Volume 27. Quantum computers, micro- and nanoelectronics. Physics, technology
The monographic collection presents theoretical and experimental results obtained by the staff of the Institute in the field of physics, modeling and technologies of advanced nanotransistor structures for logical circuits (UBIS). nanostructures for solid-state generators of the terahertz frequency range. Studies of key technological processes of manufacturing such devices with critical dimensions of 11-32 nm are presented: electron beam lithography, plasma nano-structuring, atomic layer deposition of dielectrics and metals. The results in the field of microstructuring of porous low-k dielectrics for multilevel metallization systems are presented. Most of the studies were conducted within the framework of the FNI FANO Program of Russia. For specialists in the field of micro- and nanoelectronics, postgraduates and undergraduates of relevant specialties.
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